Technote “Excimer” #3: Wedges & Lenses for Excimer Laser Beam Shaping

Explains , with the help of beam simulation software how prisms, wedges & lens segments as in Optec HY modules can be used to reshape excimer laser beams to obtain a uniformity intensity beam spot.

RA_E_03 – Wedges & Lenses for Excimer Laser Beam Shaping