Describes the principle of the coaxial debris control nozzle, developed by Optec in 1999. RA_E_04 – Debris Control in Excimer Laser Micromachining

Explains , with the help of beam simulation software how prisms, wedges & lens segments as in Optec HY modules can be used to reshape excimer laser beams to obtain a uniformity intensity beam spot. RA_E_03 – Wedges & Lenses for Excimer Laser Beam Shaping

Reviews commercially available excimer lasers, dividing these into groups with comparable characteristics, and examines the pros & cons of different processing wavelengths, and well as briefly examining alternatives to excimer lasers. RA_E_02 – Excimer Lasers – Choice, Size & Wavelength

Deals with the basics of laser micromachining as it specifically applied to excimer lasers in mask projection systems, and how the process parameters,- wavelength, energy density & shot dose,- influence machine architecture. RA_E_01 – Fundamentals of Excimer Laser Micromach

Examines what determines spot size in typical scan lenses, taking account of M2, Apodisation Factor & half power vs 1/e2 points. Compares approximate theory to practical results. RA_SP_02 – Spot Size for Scan (& other) Lenses

Examines the mechanism of material removal using Ultra Short Pulse lasers, in a process where HAZ is negligible, underlining the high precision that can be obtained, at limited throughput. RA_SP_01 – Short Pulse Lasers for Precision Cutting

Examines the physics of devices used to move air around,- pump, blower, fan, extractor etc.,- and how that applies to fume extraction during laser machining, and holding parts down. RAG07O – Moving Air,- Equipment for Sucking & Holding

Discusses motion stage components & different types of stages, and what determines overall positioning error OPE. Looks at lead performance, guide errors, stacking of stages, look-up tables & dynamics. RAG06O – Specifing Part Positiioing Equipment

A very basic treatment of simple lenses & spherical aberration, showing how performance can be improved by using correctly designed doublets & triplets. RAG05O – Lenses for Absolute Beginners

For multi-beam systems, compares the pros & cons of in-line design where process Optics are mounted on separate Z stages, compared to systems where optics mounted on a turret, as in an optical microscope. RAG04O- System Architecture – In-Line vs Turret Optics