Deals with the design of integrating type beam homogenizers based on microlens arrays, covering single or double arrays, the use of a field lens, numerical aperture & telecentricity. RA_E_07 – Design Rules for Array Type Homogenizers

Deals with the range of masks used in projection systems, including simple motifs, motif sectectors, dynamic masks, complex masks for parallel processing, mask scanning & OCM, rotating masks & M/FS & grey scale masks. RA_E_06 – mask options for excimer laser micromachining

Attemps to cram optical theory into 4 pages, dealing with what limits resolution, DOF etc.; specifically aimed at excimer laser micromachining but relevant to other situations, includes handy formulae. RA_E_05 – Excimer Laser Micromachiner’s Optics Primer

Describes the principle of the coaxial debris control nozzle, developed by Optec in 1999. RA_E_04 – Debris Control in Excimer Laser Micromachining

Explains , with the help of beam simulation software how prisms, wedges & lens segments as in Optec HY modules can be used to reshape excimer laser beams to obtain a uniformity intensity beam spot. RA_E_03 – Wedges & Lenses for Excimer Laser Beam Shaping

Reviews commercially available excimer lasers, dividing these into groups with comparable characteristics, and examines the pros & cons of different processing wavelengths, and well as briefly examining alternatives to excimer lasers. RA_E_02 – Excimer Lasers – Choice, Size & Wavelength

Deals with the basics of laser micromachining as it specifically applied to excimer lasers in mask projection systems, and how the process parameters,- wavelength, energy density & shot dose,- influence machine architecture. RA_E_01 – Fundamentals of Excimer Laser Micromach

Examines what determines spot size in typical scan lenses, taking account of M2, Apodisation Factor & half power vs 1/e2 points. Compares approximate theory to practical results. RA_SP_02 – Spot Size for Scan (& other) Lenses

Examines the mechanism of material removal using Ultra Short Pulse lasers, in a process where HAZ is negligible, underlining the high precision that can be obtained, at limited throughput. RA_SP_01 – Short Pulse Lasers for Precision Cutting

Examines the physics of devices used to move air around,- pump, blower, fan, extractor etc.,- and how that applies to fume extraction during laser machining, and holding parts down. RAG07O – Moving Air,- Equipment for Sucking & Holding