Technote “Excimer” #7: Design Rules for Array Type Homogenizers
Deals with the design of integrating type beam homogenizers based on microlens arrays, covering single or double arrays, the use of a field lens, numerical aperture & telecentricity.
Deals with the design of integrating type beam homogenizers based on microlens arrays, covering single or double arrays, the use of a field lens, numerical aperture & telecentricity.