Technote “Excimer” #5: Excimer Laser Micromachiner’s Optics Primer

Attemps to cram optical theory into 4 pages, dealing with what limits resolution, DOF etc.; specifically aimed at excimer laser micromachining but relevant to other situations, includes handy formulae.

RA_E_05 – Excimer Laser Micromachiner’s Optics Primer