Technote “Excimer” #16: Process Strategies for Excimer Laser Patterning

Examines the different strategies,- S&R, OTF, MS, OCM, & SCR.,- for 2D excimer patterning, in which different mask options are combined with synchronized laser firing & part motion. Discusses extension to 3D machining via OG & CS.

RAE16 – Process Strategies for Excimer Laser