Technote “Excimer” #12: Optics Lifetime Effects in Excimer Systems

Examines what limits the lifetime of the UVFS & CaF2 optics used for excimer lasers, looking at bulk effects , surface effect including AT coatings, and contamination. Gives a guide to expected lifetime & examines how optics can be protected.

RAE12 – Lifetime of Optics in Excimer Laser Systems